ΩPro Resistance Testing System

The ΩPro probe test solution performs seven tests involving resistance measurements.Four point probe, resistivity measurement, material film, SiC, Gan；Measurement and analysis of the third generation semiconductor

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PRODUCT OVERVIEW

Since 1968, Lucas signatone has designed and manufactured four point probe equipment for measuring the resistivity of semiconductor chips. The four point probe measurement system has been applied to various material research applications and measuring thin films on various substrates.

◢Ω Pro resistivity measurement system is applied in combination with signatone hardware (such as probe table, probe,

probe base...) to achieve the required measured values.

Application of Ω Pro resistivity measurement system solution in---

• Sheet resistance mapping of thin films with a collinear 4 point probe

• Temperature co-efficient of resistance of thin films with collinear 4 point probe

• Precision temperature co-efficient of resistance with 2 point Kelvin probes and precision surface temperature probe

• Precision resistor testing with 2 point Kelvin probes

• Precision resistor testing with a Kelvin probe card

• Precision temperature co-efficient of resistance resistor test

• Standard TCR test of multiple resistors with Kelvin probes or a probe card

• Vander Pau four point measurements on Vander Pau micro structures or thin films

Vander Pau ΩPro Resistance Testing System